用于非球面检测误差校正的子孔径拼接算法研究

Wei Yan, Pei-ji Guo, Xi Chen, Yuting Xu
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引用次数: 0

摘要

在大孔径或大孔径角光学表面的测试中,子孔径拼接技术已经发展了很长时间,而大多数测试分析是针对旋转对称表面的。针对一种基于离散相位数据的圆柱面子孔径拼接算法,采用勒让德多项式拟合波面,对几个主要影响因素进行了数值模拟和分析。例如,在拼接子孔径过程中,对离散相位的非数值点和重叠区域的模糊点采用双三次插值方法,考虑到其精度和计算时间。考虑非旋转对称柱面检测中的对准误差、随机噪声、位置误差,特别是旋转误差,从一次实测相位数据中激发9个子孔径相位数据,分析修正系数,确定拼接算法的误差修正百分比。当校正系数接近1时,拼接结果很可能是过校正。为了达到最佳的误差校正效果,校正系数应设置在0.6左右。结合混沌粒子群算法,降低了算法陷入局部最优的可能性,提高了拼接精度。
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Research of sub-aperture stitching algorithm for error correction in aspheric surface testing
In the testing of optical surfaces with large aperture or large aperture angle, sub-aperture stitching technology has been developed for a long time, while most testing analysis is for the rotationally symmetrical surface. In view of a cylindrical surface sub-aperture stitching algorithm based on discrete phase data, by using Legendre polynomials to fit the wave surface, numerical simulation and analysis for several main influencing factors have been carried out. For instance, a bicubic interpolation method has been used for non-numerical point in a discrete phase and fuzzy points in overlapping areas during the process of stitching sub-apertures, on account of its accuracy and calculation time. By considering alignment error, random noise, position error, especially rotation error in non-rotationally symmetrical cylindrical surface testing, we stimulate 9 sub-aperture phase data from a measured phase data to analyze the correction coefficient which determines the percentage of error correction in stitching algorithm. While the correction coefficient is approaching 1, the stitching result is most likely overcorrected. In order to achieve the best error correction, the correction coefficient should be set at around 0.6. Furthermore, combined with chaos particle swarm optimization, we reduce the possibility of the algorithm falling into the local optimum, and improve the accuracy of stitching.
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