Chen Yang, T. Ren, Feng Liu, Li-tian Liu, Guang Chen, X. Guan, A. Wang
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On-Chip Integrated Inductors with Ferrite Thin-films for RF IC
This paper reports fabrication of on-chip RF integrated inductors with spin-coated ferrite thin-films (Ni-Zn-Cu-Fe-O, Y-Bi-Fe-O and Co-Zr-O) and high-frequency characterization using equivalent circuit model. Measurement results show that, compared with air-cored inductor, the inductance (L) of Y-Bi-Fe-O and Co-Zr-O thin-film samples increases by 26-50% and 20-39% in 0.1-9GHz, respectively; while the quality factor (Q) of Co-Zr-O inductor is improved by 25-59%. This work demonstrates that the ferrite thin-films are promising for making high-performance integrated compact inductors for RF IC applications
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