带内矩形支承的ST切割石英表面波谐振器面内加速度灵敏度分析

H. Tiersten, D.V. Shick
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引用次数: 12

摘要

分析了st切割石英表面波谐振器在衬底延伸到内部矩形支撑之外时的面内加速度灵敏度。在这种处理中,所有条件都表现为自然条件的变分原理得到了这样的扩展,即允许具有弹簧支承的不连续内表面,在这种情况下,近似解函数不必满足约束型条件。将得到的扩展偏置状态与声表面波模态的适当连续表示一起用于现有的摄动积分中,以计算该支撑结构的面内加速度灵敏度。结果显示为一个函数的平面纵横比的一些翻转构型。
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An analysis of the in-plane acceleration sensitivity of ST cut quartz surface wave resonators with interior rectangular supports
The in-plane acceleration sensitivity of ST-cut quartz surface-wave resonators with the substrate extending beyond interior rectangular supports is analyzed. In the treatment the variational principle with all conditions appearing as natural conditions is extended in such a way as to permit interior surfaces of discontinuity with spring supports at which the approximating solution functions need not satisfy the constraint-type conditions. The resulting extensional biasing state is used in the existing perturbation integral along with the proper continuous representation of the acoustic surface wave mode shape to calculate the in-plane acceleration sensitivity for this support configuration. Results are presented as a function of planar aspect ratio for a number of overhand configurations.<>
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