低损耗885nm大功率激光二极管外延结构的优化

Shunhua Wu, Te Li, Dan Wang, Xuecheng Yu, Zhenfu Wang, Guojun Liu
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引用次数: 2

摘要

针对大功率885nm激光二极管的外延结构,研究了限制输出功率和功率转换效率进一步提高的因素。在此基础上,对激光二极管的外延结构进行了优化,并从理论上模拟了波导层厚度对载流子吸收损耗和串联电阻的影响。结果表明,采用n面与p面厚度之比为6:4的非对称波导结构可以最大程度地降低载流子吸收损耗。在模拟结果的基础上,制备了具有优化外延结构的885nm激光棒,并在25℃的环境温度下,在250μs、200Hz的准连续波模式下进行了测试。斜率效率达到1.26W/A,串联电阻仅为1.2mΩ。在250A注入电流下实现277.6W的功率,最大功率转换效率超过64%。
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Optimization of the epitaxial structure of low-loss 885nm high-power laser diodes
Aiming at the epitaxial structure of the high-power 885nm laser diodes, the factors limiting the further increase of the output power and the power conversion efficiency were investigated. According to the analysis, the epitaxial structure of the laser diodes was optimized, and the influence of the waveguide layer thickness on the carrier absorption loss and the series resistance was theoretically simulated. The results showed that the asymmetric waveguide structure with the thickness ratio of the N-side and the P-side of 6:4 can reduce the carrier absorption loss to the greatest extent. Based on the simulation results, the 885nm laser bars with the optimized epitaxial structure were fabricated and tested under the ambient temperature of 25℃ in a quasi-continuous wave mode of 250μs and 200Hz. The slope efficiency reaches 1.26W/A, while the series resistance is only 1.2mΩ. The power of 277.6W is achieved at 250A injection current and the maximum power conversion efficiency exceeds 64%.
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