Two-Dimensional Thermal Analysis Of Multi-Layer Thin Film Pyroelectric Infrared Detectors

Two-dimensional thermal analysis of multi-layer thin film pyroelectric infrared detectors is performed according to the structure and test conditions of detectors and the temperature distribution of detectors is obtained. Result shows that the insulation layer of multi-layer film pyroelectric infrared detector can effectively reduce thermal flow from pyroelectric layer substrate and the response of detector increases with the increasing of insulation layer thickness; when the thermal conductivity of insulation layer is lower than of air, its performance is better than micro-bridge structure.