基于磁控溅射的ZnO表面润湿性可调取向层液晶显示装置

Zhen Long, Qing Li, Xianyu Zhao, Yujian Shi, Siming Li, Renli Sun
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引用次数: 1

摘要

无机取向技术已逐渐成为液晶取向领域的研究热点。本文采用磁控溅射技术,在氧化铟锡玻璃上以固定的斜角沉积氧化锌无机薄膜作为液晶显示器的替代排列层。通过退火控制ZnO薄膜的润湿性,可以控制液晶分子的排列状态。结果表明,经过特殊处理的ZnO薄膜基板在可见光波段的透光率满足LCD面板的要求。采用zno基基片制备的LCD电池具有与基于机械摩擦聚酰亚胺的电控双折射(ECB)模式的LCD电池相似的透射电压曲线,并且由于液晶分子的预倾角略高,zno基LCD电池具有较低的阈值电压。此外,基于zno的液晶电池的响应时间比基于pi的电池快近一半。
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Liquid Crystal Display Device with Tunable Surface Wettability Alignment Layer of ZnO Using Magnetron Sputtering
Inorganic alignment technology has gradually become a research focus of Liquid Crystal (LC) alignment. In this paper, Zinc oxide (ZnO) inorganic films as an alternative alignment layer for liquid crystal displays were deposited at fixed oblique angles on Indium Tin Oxide (ITO) glass using magnetron sputtering. By controlling the wettability of the ZnO film through annealing, the alignment states of Liquid crystal molecules can be manipulated. The results showed that the transmittance of the specially treated ZnO film substrate met the need of LCD panels in the visible light band. The LCD cells fabricated using ZnO-based substrates have the similar transmittance-voltage curves as the one with electronically controlled birefringent (ECB) mode based on mechanically rubbed polyimide, and that the ZnO-based LCD cell has a lower threshold voltage due to the slightly higher pretilt angle of the liquid crystal molecules. In addition, the ZnO-based liquid crystal cell has a nearly half faster response time than the PIbased cell.
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