一种用于平面光波电路的高性能光聚合物

I. McEwan, N. Suyal, X. Li, F. Tooley
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引用次数: 5

摘要

本文报道了一种T/sub / >150/spl度/C的新型多功能丙烯酸酯基光聚合物配方的研制及其在光波导制造中的应用。单模平面光波导采用掩模曝光后显影的方法制备。在1550、1300和850 nm处的波导损耗分别为0.7、0.4和0.05 dB/cm。聚合物薄膜的双折射约为1 / sp1倍/ 10/sup -3倍。在85/spl℃和85%相对湿度条件下,波导没有变质或分层。
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A high performance optical photo-polymer for planar lightwave circuits
Development of a novel multifunctional acrylate based photo-polymer formulation with T/sub g/ >150/spl deg/C and its application in the fabrication of optical waveguides is reported. Single mode planar optical waveguides were fabricated using UV exposure through a mask followed by development. Waveguide losses at 1550, 1300 and 850 nm as measured using cutback method were 0.7, 0.4 and 0.05 dB/cm respectively. Birefringence in polymer films was around 1 /spl times/ 10/sup -3/. Waveguides subjected to 85/spl deg/C, under 85% relative humidity conditions showed no deterioration or delamination.
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