M. Malak, K. Jefimovs, Irène Philipoussis, J. di Francesco, B. Guldimann, T. Scharf
{"title":"片上傅里叶变换光谱仪的功能微纳结构","authors":"M. Malak, K. Jefimovs, Irène Philipoussis, J. di Francesco, B. Guldimann, T. Scharf","doi":"10.1109/DTIP.2014.7056640","DOIUrl":null,"url":null,"abstract":"Spectral analysis can be achieved using various optical microsystems. Amongst, we can cite: Fabry-Pérot and Michelson interferometers, Array Waveguide Grating and Standing wave Fourier Transform spectrometer. Recently, a study aiming miniaturization has been conducted on focal Plane Array Spectrometers (FPAS). Up to the authors' knowledge, this is the first report about a realization of a compact Fourier Transform optical spectrometer based on micro-nano structures, combining a polymer-based integrated optical circuit with movable external mirror for increased sampling and high precision.","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Functional micro-nano structures for on-chip fourier transform spectrometers\",\"authors\":\"M. Malak, K. Jefimovs, Irène Philipoussis, J. di Francesco, B. Guldimann, T. Scharf\",\"doi\":\"10.1109/DTIP.2014.7056640\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Spectral analysis can be achieved using various optical microsystems. Amongst, we can cite: Fabry-Pérot and Michelson interferometers, Array Waveguide Grating and Standing wave Fourier Transform spectrometer. Recently, a study aiming miniaturization has been conducted on focal Plane Array Spectrometers (FPAS). Up to the authors' knowledge, this is the first report about a realization of a compact Fourier Transform optical spectrometer based on micro-nano structures, combining a polymer-based integrated optical circuit with movable external mirror for increased sampling and high precision.\",\"PeriodicalId\":268119,\"journal\":{\"name\":\"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)\",\"volume\":\"45 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DTIP.2014.7056640\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DTIP.2014.7056640","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Functional micro-nano structures for on-chip fourier transform spectrometers
Spectral analysis can be achieved using various optical microsystems. Amongst, we can cite: Fabry-Pérot and Michelson interferometers, Array Waveguide Grating and Standing wave Fourier Transform spectrometer. Recently, a study aiming miniaturization has been conducted on focal Plane Array Spectrometers (FPAS). Up to the authors' knowledge, this is the first report about a realization of a compact Fourier Transform optical spectrometer based on micro-nano structures, combining a polymer-based integrated optical circuit with movable external mirror for increased sampling and high precision.