共光路结构干涉仪系统的设计

Zhiqiang Lin, Yuting Wu, D. Lian, Min Wang
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摘要

干涉仪作为一种波长量级的精密仪器,在光学透镜的生产中起着重要的作用,是光学轮廓检测的重要仪器。基于偏振特怀曼-格林干涉仪,搭建了表面探测实验装置。通过分析实验过程中存在的问题,在原有的基础上进行了以下改进:首先,在使用双光路系统采集条纹时,发现空气的干扰对成像质量有很大的影响,因此我们参考菲索干涉原理,为了提高整个系统的抗干扰能力,将Twyman-Green干涉仪的双光路结构组合成一个共光路结构。其次,由于检测孔径和面型会受到标准反射镜的极大限制,因此在课题组前期研究的基础上,本设计设计了一种大F数和长焦距的标准反射镜,用于检测不同的透镜,特别是凸面镜。最后,为了提高干涉条纹的对比度,利用光学镀膜软件设计了具有合适透光率和反射率的平面反射膜,以提高干涉条纹的对比度。
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Design of interferometer system with common optical path structure
As a precision instrument of wavelength magnitude, interferometer plays an important role in the production of optical lenses, and it is an important instrument for optical profile detection. Based on the polarization Twyman-Green interferometer, the experimental device of surface detection is built. By analyzing the problems in the experimental process, the following improvements are made on the original basis: firstly, when using the dual optical path system to collect fringes, it is found that the interference of air has a great impact on the image quality, so we refer to the principle of Fizeau interference, In order to improve the anti-interference ability of the whole system, the double optical path structure of the Twyman-Green interferometer is combined into a common optical path structure. Secondly, because the detection aperture and surface type will be greatly limited by the standard mirror, so based on the previous research of the research group, this design designs a large F number and long focal length standard mirror for the detection of different lenses, especially the convex mirror. Finally, in order to improve the contrast of interference fringes, a plane mirror film with suitable transmittance and reflectance ratio is designed by using optical coating software to improve the contrast of interference fringes.
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