{"title":"用于WDM光纤通信应用的多晶硅3d镜像移频器","authors":"X.M. Zhang, F. Chollet, F. Chau, C. Quan, A. Liu","doi":"10.1109/OMEMS.2000.879635","DOIUrl":null,"url":null,"abstract":"This paper reports the design, fabrication, and testing of a monolithic integrated frequency shifter device using movable 3D-mirror to enable channel selection for WDM optics communication applications. The modification of Fabry-Perot microcavity length is implemented by micromechanical electrostatic actuators to enable a wide channel selection. The wavelength shifter is able to tune wavelength around 1.525-1.575 /spl mu/m to achieve the requirements of optical telecommunication band, and the flat transmission characteristic with low insertion losses over maximal wavelength range and minimal interchannel crosstalk between the coexisting transmission channels. Compared with the membrane mirror type of frequency shifter, the movable 3D-mirror frequency shifter overcomes the influence of residual stress within the membrane layers.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"84 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Polysilicon 3D-mirror frequency shifter for WDM fibre-optic communication applications\",\"authors\":\"X.M. Zhang, F. Chollet, F. Chau, C. Quan, A. Liu\",\"doi\":\"10.1109/OMEMS.2000.879635\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports the design, fabrication, and testing of a monolithic integrated frequency shifter device using movable 3D-mirror to enable channel selection for WDM optics communication applications. The modification of Fabry-Perot microcavity length is implemented by micromechanical electrostatic actuators to enable a wide channel selection. The wavelength shifter is able to tune wavelength around 1.525-1.575 /spl mu/m to achieve the requirements of optical telecommunication band, and the flat transmission characteristic with low insertion losses over maximal wavelength range and minimal interchannel crosstalk between the coexisting transmission channels. Compared with the membrane mirror type of frequency shifter, the movable 3D-mirror frequency shifter overcomes the influence of residual stress within the membrane layers.\",\"PeriodicalId\":148819,\"journal\":{\"name\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"volume\":\"84 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-08-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2000.879635\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879635","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Polysilicon 3D-mirror frequency shifter for WDM fibre-optic communication applications
This paper reports the design, fabrication, and testing of a monolithic integrated frequency shifter device using movable 3D-mirror to enable channel selection for WDM optics communication applications. The modification of Fabry-Perot microcavity length is implemented by micromechanical electrostatic actuators to enable a wide channel selection. The wavelength shifter is able to tune wavelength around 1.525-1.575 /spl mu/m to achieve the requirements of optical telecommunication band, and the flat transmission characteristic with low insertion losses over maximal wavelength range and minimal interchannel crosstalk between the coexisting transmission channels. Compared with the membrane mirror type of frequency shifter, the movable 3D-mirror frequency shifter overcomes the influence of residual stress within the membrane layers.
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