面向无接收机系统的Si槽波导低电容超薄InGaAs薄膜光电探测器

2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) Pub Date : 2022-06-12 DOI:10.1109/vlsitechnologyandcir46769.2022.9830204

Tomohiro Akazawa, D. Wu, Kai Sumita, N. Sekine, M. Okano, K. Toprasertpong, Shinichi Takagi, M. Takenaka

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引用次数: 1

摘要

我们提出了一种由超薄InGaAs薄膜和Si槽波导组成的Si/III-V混合波导光电探测器，同时实现了低电容和高响应。硅槽波导中的强光约束增强了InGaAs膜的光吸收。因此，我们成功地展示了1 a /W的高响应性和1.9 fF的足够小的电容，以实现无接收器(TIA-less)系统。

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Low-capacitance Ultrathin InGaAs Membrane Photodetector on Si Slot Waveguide towards Receiver-less System

We proposed a Si/III-V hybrid waveguide photodetector consisting of an ultrathin InGaAs membrane and Si slot waveguide, enabling low capacitance and high responsivity simultaneously. The strong optical confinement in a Si slot waveguide enhanced optical absorption in the InGaAs membrane. As a result, we successfully demonstrated high responsivity of 1 A/W and sufficiently small capacitance of 1.9 fF to realize a receiver-less (TIA-less) system.

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2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)

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