M. Ramiączek-Krasowska, A. Szyszka, R. Paszkiewicz, J. Lukes
{"title":"纳米压头作为纳米光刻工具的应用","authors":"M. Ramiączek-Krasowska, A. Szyszka, R. Paszkiewicz, J. Lukes","doi":"10.1109/STYSW.2011.6155847","DOIUrl":null,"url":null,"abstract":"In the paper the results of nanoscratching of gold metal layer deposited on resist made with application of a nanoindenter are presented. Also in the paper the properties of nanoscratching as nanotool are presented. The authors showed what problems exists in application of nanoindenters as systems used for nanoscratching lithography.","PeriodicalId":261643,"journal":{"name":"2011 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","volume":"310 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Application nanoindenter as nanolithography tool\",\"authors\":\"M. Ramiączek-Krasowska, A. Szyszka, R. Paszkiewicz, J. Lukes\",\"doi\":\"10.1109/STYSW.2011.6155847\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In the paper the results of nanoscratching of gold metal layer deposited on resist made with application of a nanoindenter are presented. Also in the paper the properties of nanoscratching as nanotool are presented. The authors showed what problems exists in application of nanoindenters as systems used for nanoscratching lithography.\",\"PeriodicalId\":261643,\"journal\":{\"name\":\"2011 International Students and Young Scientists Workshop \\\"Photonics and Microsystems\\\"\",\"volume\":\"310 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-07-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 International Students and Young Scientists Workshop \\\"Photonics and Microsystems\\\"\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/STYSW.2011.6155847\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/STYSW.2011.6155847","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
In the paper the results of nanoscratching of gold metal layer deposited on resist made with application of a nanoindenter are presented. Also in the paper the properties of nanoscratching as nanotool are presented. The authors showed what problems exists in application of nanoindenters as systems used for nanoscratching lithography.
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