光学材料UV和VUV清洗的最新进展

2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601) Pub Date : 2002-12-11 DOI:10.1109/COMMAD.2002.1237228

D. Kane, A. Fernandes, D. Hirschausen, S. Pleasants, B. Ward

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引用次数: 2

摘要

概述了麦考瑞大学短波长与材料相互作用(SWIM)项目材料加工分支的最新成就。本研究的重点是使用短脉冲紫外激光器和其他新型紫外源来清洁光学、光电和光子材料中的小颗粒(包括亚微米颗粒)和碳氢化合物。

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Recent advances in UV and VUV cleaning of optical materials

An overview is given of recent achievements of the Materials Processing Branch of the Short Wavelengths and Interactions with Materials (SWIM) program at Macquarie University. This research focuses on using short-pulsed UV lasers and other novel VUV sources to clean small particles (including sub-micron particles) and hydrocarbons from optical, optoelectronic and photonic materials.

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2002 Conference on Optoelectronic and Microelectronic Materials and Devices. COMMAD 2002. Proceedings (Cat. No.02EX601)

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