{"title":"自极化热释电LiTaO3薄膜","authors":"A. Garraud, S. Nadar, A. Giani, P. Combette","doi":"10.1109/DTIP.2014.7056642","DOIUrl":null,"url":null,"abstract":"We present a characterization study to develop self-polarized, highly pyroelectric lithium tantalate thin films obtained by RF magnetron sputtering. A preliminary work is done on the bottom electrode to reduce short-term variations of the pyroelectric behavior. Then, the influence of pressure and of deposition temperature is studied to determine the best set of parameters as to obtain a large pyroelectric behavior. The crystalline structure modification as well as the influence on the pyroelectric coefficient have been studied in each case. An as-deposited pyroelectric coefficient as high as 32 μC.m-2.K-1 has been obtained for the optimal set of pressure (2 mTorr) and temperature (630 °C).","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Self-polarized pyroelectric LiTaO3 thin films\",\"authors\":\"A. Garraud, S. Nadar, A. Giani, P. Combette\",\"doi\":\"10.1109/DTIP.2014.7056642\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a characterization study to develop self-polarized, highly pyroelectric lithium tantalate thin films obtained by RF magnetron sputtering. A preliminary work is done on the bottom electrode to reduce short-term variations of the pyroelectric behavior. Then, the influence of pressure and of deposition temperature is studied to determine the best set of parameters as to obtain a large pyroelectric behavior. The crystalline structure modification as well as the influence on the pyroelectric coefficient have been studied in each case. An as-deposited pyroelectric coefficient as high as 32 μC.m-2.K-1 has been obtained for the optimal set of pressure (2 mTorr) and temperature (630 °C).\",\"PeriodicalId\":268119,\"journal\":{\"name\":\"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)\",\"volume\":\"52 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DTIP.2014.7056642\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DTIP.2014.7056642","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
We present a characterization study to develop self-polarized, highly pyroelectric lithium tantalate thin films obtained by RF magnetron sputtering. A preliminary work is done on the bottom electrode to reduce short-term variations of the pyroelectric behavior. Then, the influence of pressure and of deposition temperature is studied to determine the best set of parameters as to obtain a large pyroelectric behavior. The crystalline structure modification as well as the influence on the pyroelectric coefficient have been studied in each case. An as-deposited pyroelectric coefficient as high as 32 μC.m-2.K-1 has been obtained for the optimal set of pressure (2 mTorr) and temperature (630 °C).
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