{"title":"基于SOI结构的光电微动开关","authors":"S. Chouteau, J. Boussey, B. Cabon, A. Iliadis","doi":"10.1109/SOI.1995.526450","DOIUrl":null,"url":null,"abstract":"Optical waveguiding in BESOI (Bond and Etch back Silicon On Insulator) structures is investigated as a command tool for microwave signal transmission in coplanar lines. This paper reports the formation and the propagation characteristics of an optoelectronic microwave microswitch.","PeriodicalId":149490,"journal":{"name":"1995 IEEE International SOI Conference Proceedings","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":"{\"title\":\"Optoelectronic microswitch on SOI based structure\",\"authors\":\"S. Chouteau, J. Boussey, B. Cabon, A. Iliadis\",\"doi\":\"10.1109/SOI.1995.526450\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Optical waveguiding in BESOI (Bond and Etch back Silicon On Insulator) structures is investigated as a command tool for microwave signal transmission in coplanar lines. This paper reports the formation and the propagation characteristics of an optoelectronic microwave microswitch.\",\"PeriodicalId\":149490,\"journal\":{\"name\":\"1995 IEEE International SOI Conference Proceedings\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1995-10-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"9\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1995 IEEE International SOI Conference Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SOI.1995.526450\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1995 IEEE International SOI Conference Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SOI.1995.526450","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 9
摘要
研究了BESOI (Bond and Etch back Silicon On Insulator)结构中的光波导作为共面线中微波信号传输的指挥工具。本文报道了一种光电微波微动开关的形成及其传播特性。
Optical waveguiding in BESOI (Bond and Etch back Silicon On Insulator) structures is investigated as a command tool for microwave signal transmission in coplanar lines. This paper reports the formation and the propagation characteristics of an optoelectronic microwave microswitch.
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