锗离子注入绝缘体上硅平台的光波导

2018 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR) Pub Date : 2018-07-29 DOI:10.1364/CLEOPR.2018.TH3C.3

Xia Chen, M. Milosevic, A. Khokhar, D. Thomson, G. Reed

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引用次数: 1

摘要

我们展示了一种新型的集成光子波导，它是通过在硅绝缘体上的硅平台上注入锗离子而形成的。它们被成功地制造和表征，并且有可能被激光退火擦除。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Optical Waveguides by Germanium Ion Implantation on Silicon-On-Insulator Platform

We demonstrated a new type of integrated photonic waveguides formed by Ge ion implantation in the silicon slab on silicon-on-insulator platform. They were successfully fabricated and characterised, and can be potentially erased by laser annealing.

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2018 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)

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