{"title":"过程中表面粗糙度测量装置，用于信息化抛光过程的实时调整和优化","authors":"D. Moszko, O. Faehnle, C. Vogt, D. Kim","doi":"10.1117/12.2596034","DOIUrl":null,"url":null,"abstract":"In this paper we present a feasible variant of a device for in-process roughness measurement during an optical polishing process. The system, already presented as Tirm respectively I-Tirm, has been technically varied and can now be integrated into almost any lever polishing process with little effort. This enables new possibilities regarding real-time optical manufacturing process monitoring and optimization.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"87 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization\",\"authors\":\"D. Moszko, O. Faehnle, C. Vogt, D. Kim\",\"doi\":\"10.1117/12.2596034\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper we present a feasible variant of a device for in-process roughness measurement during an optical polishing process. The system, already presented as Tirm respectively I-Tirm, has been technically varied and can now be integrated into almost any lever polishing process with little effort. This enables new possibilities regarding real-time optical manufacturing process monitoring and optimization.\",\"PeriodicalId\":422212,\"journal\":{\"name\":\"Precision Optics Manufacturing\",\"volume\":\"87 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-06-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Precision Optics Manufacturing\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2596034\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Optics Manufacturing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2596034","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
在本文中，我们提出了一种可行的变型装置，用于光学抛光过程中的过程粗糙度测量。该系统，已经分别提出了tim i - tim，已经在技术上变化，现在可以集成到几乎任何杠杆抛光过程中，只需很少的努力。这为实时光学制造过程监控和优化提供了新的可能性。
In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization
In this paper we present a feasible variant of a device for in-process roughness measurement during an optical polishing process. The system, already presented as Tirm respectively I-Tirm, has been technically varied and can now be integrated into almost any lever polishing process with little effort. This enables new possibilities regarding real-time optical manufacturing process monitoring and optimization.
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