大气中硅的表面放电现象

Guanjun Zhang, Wenxing Zhao, Yan Sun, Zhang Yan
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引用次数: 4

摘要

随着半导体器件在高压、大功率技术领域的逐步应用,半导体材料的高场特性受到了人们的重视。然而,它的发展遇到了表面放电/闪络的限制。基于电压、电流波形的测量和光学观测,对大气脉冲激励下硅样品的表面现象进行了初步研究。并将其放电性能与绝缘环氧树脂进行了比较。由于注入电流密度的不均匀性和焦耳热效应,硅内部产生了电流灯丝现象,这对半导体表面放电现象产生了强烈的影响,导致其行为不同于绝缘材料。
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Surface discharge phenomena of silicon in atmospheric air
Semiconductor devices are being gradually applied in the fields of high-voltage and high-power technology, and thus the high-field characteristics of semiconducting materials have been paid much attention. However, its development meets the limitation of surface discharge/flashover. Based on the measurement of voltage and current waveforms and the optical observation, the surface phenomena across silicon samples were preliminarily investigated under pulsed excitation in atmosphere. Moreover, its discharge behaviors are compared with that of insulating epoxy resin. It is suggested that there was current filament phenomena occurred inside the silicon resulted from the inhomogeneity of injected current density and Joule heating effect, which strongly affect the surface discharge phenomena of semiconductor and liable for its behaviors different from insulating materials.
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