金属光圈微加工固体浸没透镜

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) Pub Date : 2000-08-21 DOI:10.1109/OMEMS.2000.879661

D. A. Fletcher, D. Simanovskii, D. Palanker, K. Crozier, C. Quate, G. Kino, K. Goodson

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引用次数: 2

摘要

我们使用微加工固体浸没透镜和金属光圈证明了空间分辨率优于/spl λ //10的红外透光率为10/sup -3/。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Microfabricated solid immersion lens with metal aperture

We demonstrate spatial resolution better than /spl lambda//10 in the infrared with a transmittance of 10/sup -3/ using a microfabricated solid immersion lens and metal aperture.

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2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)

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