改善铋石榴石薄膜结构和磁光性能的新方法

Siyi Zhang, H. W. Zhang, X. Y. Guo, F. Zhang, C. Xu, B. Guo, Dimin Luo, Z. Y. Zhong
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摘要

研究了一种改善溅射铋石榴石薄膜结构和磁光性能的新方法。该方法采用高温爬坡率循环退火和空气淬火。晶粒尺寸小(43.0 nm ~约30.0 nm),表面光滑,膜内气泡较少。我们发现反复退火次数较多的样品只出现在石榴石相,而反复退火次数较少的样品则出现在石榴石相和DyFeO3相。同时,由于膜中晶相的体积转变速率的增加,法拉第角和矫顽力随循环次数的增加而增大。采用该方法制备的石榴石薄膜具有优异的磁性和MO性能,晶粒尺寸约为30.0 nm。
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New method to improve the structure and magneto-optical properties of bismuth garnet films
A new method to improve the structure and the magnetic-optical (MO) properties of sputtered bismuth garnet films for MO storage has been studied. The method employs high temperature ramp-up rate recurrent annealing as well as quenching in air environment. It results in small grain size (43.0 nm to approximately 30.0 nm), smooth surface, and less bubbles in the garnet film than those with conventional annealing. We discovered that the sample with more recurrent annealing only appeared in garnet phase, and its counterpart with fewer recurrent annealing appeared in garnet phase as well as DyFeO3 phase. Meanwhile the Farady angle and the coercivity increase with the recurrent number due to the increase of volume transitional rate of crystal phase in the film. Using this new method, garnet film has been successfully crystallized with a grain size of about 30.0 nm with excellent magnetic and MO properties.
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