基于低成本多层叠层MCM技术的嵌入式电感设计与分析

R. Lee, Gye-an Lee, Mohamed Megahed
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引用次数: 13

摘要

在低成本MCM层压板上设计并分析了基于射频测量的嵌入式电感。在介电堆积为50/200/50的4层MCM层压板上开发了单层和多层电感库。给出了表征过程和建模方法,并给出了解析方程。研究了工艺变化对电感的影响,根据嵌入式电感的物理参数确定电感的变化范围。对每种配置进行面积分析,小于8nh推荐单层电感,大于8nh推荐双层电感。
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Design and analysis of embedded inductor on low cost multilayer laminate MCM technology
The embedded inductor is designed and analyzed on low cost MCM laminate substrate based on RF measurement. Single layer and multilayer inductance library are developed on 4-layer MCM laminate substrate with 50/200/50 dielectric stack-up. Characterization process and modeling method are presented and analytical equations are provided. Process variation effect on inductor is also studied to identify the range of inductance variation according to the physical parameters of the embedded inductor. Area analysis is conducted for each configuration and single layer inductor is recommended for less than 8 nH inductance and two-layer inductor is recommended for more than 8 nH inductance.
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