E. Courjon, N. Bodin, G. Lengaigne, L. Gauthier-Manuel, W. Daniau, S. Ballandras, P. Paruch, J. Triscone, J. Hauden
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Fabrication of periodically poled domains transducers on LiNbO3
The development of piezoelectric transducers based on periodically poled ferroelectrics domains is investigated. Optical quality Z-cut LiNbO3 wafers have been used for the fabrication of test devices operating in the range 7-70 MHz. The fabrication process is detailed and characterization results are reported. A very good agreement between theoretical predictions achieved by periodic finite element analysis and experiments is observed, allowing for a precise identification of the excited modes
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