High optical power handling of pop-up microelectromechanical mirrors

Summary form only given. Several applications of microelectromechanical systems (MEMS) require handling of large optical powers. One specific example includes steering or switching of an optical beam onto a photovoltaic device. In this way MEMS can be remotely powered with an incident high power optical beam. Photovoltaic cells integrated with MEMS can then convert the optical energy into electrical energy necessary to power the MEMS. In this paper we describe the optical damage mechanisms, as well as means of extending the optical damage threshold in order to handle 1 W of continuous wave incident power in the near infrared regime.