M. Schwerter, Marcel Gäding, M. Leester-Schädel, A. Dietzel
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A flexible sensor system in foil for combined absolute pressure and flow velocity measurements
This work reports on a foil integrated, flexible pressure- and hot-film sensor system for measuring flows over curved surfaces. The miniaturized rigid silicon piezoresistive pressure transducer with enclosed reference cavity allows absolute pressure sensing. Together with a foil-based hot-film transducer both transducers are embedded in a combination of thin epoxy resin with polyimide. This in-foil sensor system is surface passive and waterproof and can be bent to a radius of 20 mm while maintaining full functionality.
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