K. Murakami, Hiroshi Nakamura, T. Oshino, H. Nikaido
{"title":"离子束溅射制备钨/碳多层膜","authors":"K. Murakami, Hiroshi Nakamura, T. Oshino, H. Nikaido","doi":"10.1364/sxray.1991.thb4","DOIUrl":null,"url":null,"abstract":"W/C multilayers, well known as good X-ray reflecting mirrors, were prepared by ion beam sputtering. The properties of the multilayers were investigated by low-angle X-ray diffraction, transmission electron microscopy (TEM) observation of the cross section and Auger electron spectroscopy.","PeriodicalId":409291,"journal":{"name":"Soft-X-Ray Projection Lithography","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1992-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Tungsten/Carbon Multilayers Prepared By Ion Beam Sputtering\",\"authors\":\"K. Murakami, Hiroshi Nakamura, T. Oshino, H. Nikaido\",\"doi\":\"10.1364/sxray.1991.thb4\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"W/C multilayers, well known as good X-ray reflecting mirrors, were prepared by ion beam sputtering. The properties of the multilayers were investigated by low-angle X-ray diffraction, transmission electron microscopy (TEM) observation of the cross section and Auger electron spectroscopy.\",\"PeriodicalId\":409291,\"journal\":{\"name\":\"Soft-X-Ray Projection Lithography\",\"volume\":\"45 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1992-05-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Soft-X-Ray Projection Lithography\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/sxray.1991.thb4\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Soft-X-Ray Projection Lithography","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/sxray.1991.thb4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Tungsten/Carbon Multilayers Prepared By Ion Beam Sputtering
W/C multilayers, well known as good X-ray reflecting mirrors, were prepared by ion beam sputtering. The properties of the multilayers were investigated by low-angle X-ray diffraction, transmission electron microscopy (TEM) observation of the cross section and Auger electron spectroscopy.
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