{"title":"单片可变形镜用LDMOS脉冲多电平电流驱动电路","authors":"Tuo Wu, Hongyi Chen, Dahong Qian","doi":"10.1109/ICASIC.2005.1611395","DOIUrl":null,"url":null,"abstract":"The electrostatic capacitive microactuator has a critical minimum gap due to potential pull-in and tip-in phenomena. Since constant charge drive permits more stable operation range than constant voltage drive, current drive based on charge drive is attractive owing to its good controllability. Due to quasistatic precondition, a method of pulsed multilevel current drive is adopted to boost the refreshing frequency and charge level. An 80 times 80-actuator array with a refreshing frequency of 10 kHz and an 8-bit charge level is realized with this method","PeriodicalId":431034,"journal":{"name":"2005 6th International Conference on ASIC","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-10-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Pulsed multilevel current drive circuitry with LDMOS for monolithic deformable mirror\",\"authors\":\"Tuo Wu, Hongyi Chen, Dahong Qian\",\"doi\":\"10.1109/ICASIC.2005.1611395\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The electrostatic capacitive microactuator has a critical minimum gap due to potential pull-in and tip-in phenomena. Since constant charge drive permits more stable operation range than constant voltage drive, current drive based on charge drive is attractive owing to its good controllability. Due to quasistatic precondition, a method of pulsed multilevel current drive is adopted to boost the refreshing frequency and charge level. An 80 times 80-actuator array with a refreshing frequency of 10 kHz and an 8-bit charge level is realized with this method\",\"PeriodicalId\":431034,\"journal\":{\"name\":\"2005 6th International Conference on ASIC\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-10-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2005 6th International Conference on ASIC\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICASIC.2005.1611395\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 6th International Conference on ASIC","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICASIC.2005.1611395","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Pulsed multilevel current drive circuitry with LDMOS for monolithic deformable mirror
The electrostatic capacitive microactuator has a critical minimum gap due to potential pull-in and tip-in phenomena. Since constant charge drive permits more stable operation range than constant voltage drive, current drive based on charge drive is attractive owing to its good controllability. Due to quasistatic precondition, a method of pulsed multilevel current drive is adopted to boost the refreshing frequency and charge level. An 80 times 80-actuator array with a refreshing frequency of 10 kHz and an 8-bit charge level is realized with this method
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