集成巨型磁阻式角度传感器

W. Granig, C. Kolle, D. Hammerschmidt, B. Schaffer, R. Borgschulze, C. Reidl, J. Zimmer
{"title":"集成巨型磁阻式角度传感器","authors":"W. Granig, C. Kolle, D. Hammerschmidt, B. Schaffer, R. Borgschulze, C. Reidl, J. Zimmer","doi":"10.1109/ICSENS.2007.355525","DOIUrl":null,"url":null,"abstract":"An integrated GMR (giant-magnetic-resistance) sensor is presented for 360deg angular measurements of rotating magnetic fields in automotive applications. The spin-valve GMR-layers are directly applied to a standard semiconductor 0.22 mum CMOS process by vertical integration of the sensor-bridges atop of active circuitry. The entire integrated angle-sensor comprises 2 orthogonal magnetized GMR-bridges for sine and cosine signal measurements, and the subsequent signal conditioning circuitry. The entire angular sensor is designed to work in harsh automotive environment in a temperature range of -40degC to 150degC. The strength for best precision covers a wide range from 20 to 50 mT. The resulting angular information itself can be obtained by SPI-readout and calculating the arc-trigonometric function of the bridge signals with a resolution of >13 bit in an auxiliary microcontroller. After individual calibration to compensate for production spread an accuracy of typical 0.5deg is achieved.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"31","resultStr":"{\"title\":\"Integrated Gigant Magnetic Resistance based Angle Sensor\",\"authors\":\"W. Granig, C. Kolle, D. Hammerschmidt, B. Schaffer, R. Borgschulze, C. Reidl, J. Zimmer\",\"doi\":\"10.1109/ICSENS.2007.355525\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An integrated GMR (giant-magnetic-resistance) sensor is presented for 360deg angular measurements of rotating magnetic fields in automotive applications. The spin-valve GMR-layers are directly applied to a standard semiconductor 0.22 mum CMOS process by vertical integration of the sensor-bridges atop of active circuitry. The entire integrated angle-sensor comprises 2 orthogonal magnetized GMR-bridges for sine and cosine signal measurements, and the subsequent signal conditioning circuitry. The entire angular sensor is designed to work in harsh automotive environment in a temperature range of -40degC to 150degC. The strength for best precision covers a wide range from 20 to 50 mT. The resulting angular information itself can be obtained by SPI-readout and calculating the arc-trigonometric function of the bridge signals with a resolution of >13 bit in an auxiliary microcontroller. After individual calibration to compensate for production spread an accuracy of typical 0.5deg is achieved.\",\"PeriodicalId\":233838,\"journal\":{\"name\":\"2006 5th IEEE Conference on Sensors\",\"volume\":\"33 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"31\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 5th IEEE Conference on Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2007.355525\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 5th IEEE Conference on Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2007.355525","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 31

摘要

提出了一种集成式巨磁阻传感器,用于汽车旋转磁场的360度角测量。通过在有源电路顶部的传感器桥的垂直集成,自旋阀gmr层直接应用于标准半导体0.22 μ m CMOS工艺。整个集成角度传感器包括两个正交磁化gmr桥,用于正弦和余弦信号测量,以及随后的信号调理电路。整个角度传感器设计用于恶劣的汽车环境,温度范围为-40°c至150°c。最佳精度的强度范围从20到50 mT。由此产生的角度信息本身可以通过spi读出和计算桥信号的弧三角函数获得,在辅助微控制器中分辨率为>13位。经过个别校准,以补偿生产扩散的精度达到典型的0.5度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Integrated Gigant Magnetic Resistance based Angle Sensor
An integrated GMR (giant-magnetic-resistance) sensor is presented for 360deg angular measurements of rotating magnetic fields in automotive applications. The spin-valve GMR-layers are directly applied to a standard semiconductor 0.22 mum CMOS process by vertical integration of the sensor-bridges atop of active circuitry. The entire integrated angle-sensor comprises 2 orthogonal magnetized GMR-bridges for sine and cosine signal measurements, and the subsequent signal conditioning circuitry. The entire angular sensor is designed to work in harsh automotive environment in a temperature range of -40degC to 150degC. The strength for best precision covers a wide range from 20 to 50 mT. The resulting angular information itself can be obtained by SPI-readout and calculating the arc-trigonometric function of the bridge signals with a resolution of >13 bit in an auxiliary microcontroller. After individual calibration to compensate for production spread an accuracy of typical 0.5deg is achieved.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Smart microplates: integrated photodiodes for detecting bead-based chemiluminescent reactions Novel Biomolecular Finger Printing with an Active Dual-Band Antenna Biosensor Flexible Multimodal Tactile Sensing System for Object Identification Transferrin Electronic Detector for Iron Disease Diagnostics Staggered Sampling for Energy Efficient Data Collection
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1