sbtc切割应力补偿的实验验证

M. Valdois, B. Sinha, J. Boy
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引用次数: 7

摘要

SBTC-cut(应力补偿的b模和温度补偿的c模)是在1981年基于厚度-剪切石英谐振器的力-频率效应的理论计算首次预测的。实验验证了sbtc切割石英谐振器快速厚度剪切振动模式的应力补偿特性。第一组实验结果包括在双凸轮廓上的测量,在sbtc切割附近的定向圆盘谐振器,以及在轮廓面具有不同曲率半径的rt切割谐振器上的测量。对于圆柱探头结构中使用的谐振器设计,b型振动的运动阻力约为c型振动的12%。此外,还获得了两种厚度-剪切模式的平面应力系数的温度依赖性和频率-温度特性的压力依赖性实验数据。
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Experimental verification of stress compensation in the SBTC-cut
The SBTC-cut (stress compensated for the B-mode and temperature compensated for the C-mode) was first predicted in 1981 based on theoretical calculations for the force-frequency effect in thickness-shear quartz resonators. The authors have verified experimentally the stress compensation feature for the fast thickness shear mode of vibration of SBTC-cut quartz resonators. The first set of experimental results consists of measurements made on biconvex contoured, disc resonators of orientation in the neighborhood of SBTC-cut as well as on a RT-cut resonator with a different radius of curvature for the contoured faces. For the resonator design used in the cylindrical probe structure, the motional resistance for the B-mode of vibration was approximately 12% of that of the C-mode. In addition, experimental data were obtained on the temperature dependence of the planar stress coefficient and pressure dependence of the frequency-temperature characteristic for both the thickness-shear modes of the SBTC-cut.<>
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