纳米计量应用的多功能MEMS/NEMS

2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) Pub Date : 2013-08-01 DOI:10.1109/NANO.2013.6721047

L. Hao, J. Gallop, M. Stewart, K. Lees, Jie Chen

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引用次数: 1

摘要

随着微纳机电系统(M/NEMS)越来越广泛地进入传感应用和精密纳米计量领域，考虑为广泛应用量身定制的激励和读出系统所带来的优势是及时的。在本文中，我们描述了一个我们正在开发的系统，它允许激励和读出方法的组合，这对许多潜在的应用产生了影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Multi-functional MEMS/NEMS for nanometrology applications

As micro- and nano-electromechanical systems (M/NEMS) enter more widely into sensing applications and precision nanometrology it is timely to consider the advantages to be gained from a excitation and readout system which may be tailored for a wide range of applications. In this paper we describe a system that we are developing which allows a combination of excitation and readout methods which impact on many potential applications.

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2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)

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