采用石英封装的saw基传感器

2015 IEEE NW Russia Young Researchers in Electrical and Electronic Engineering Conference (EIConRusNW) Pub Date : 2015-05-07 DOI:10.1109/EICONRUSNW.2015.7102226

D. Lukyanov, S. Shevchenko, A. Kukaev, E. Filippova, M. Khivrich

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引用次数: 3

摘要

证明了石英封装在陀螺仪和加速度计中的重要性。讨论了石英封装技术，该技术提供了调节激光谐振腔频率的能力，并利用激光在控制台的相对两侧同时形成结构。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The use of quartz packaging for SAW-based sensors

The importance of the use of silica packing for gyroscopes and accelerometers quartz packaging is demonstrated. Technology of quartz packaging providing the ability to adjust the frequency of the laser resonator and the simultaneous formation of structures on opposite sides of the console using laser is discussed.

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来源期刊

2015 IEEE NW Russia Young Researchers in Electrical and Electronic Engineering Conference (EIConRusNW)

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