一种反射式F-/spl θ /透镜的设计

J.W. Huang, N.Z. Huang, D.L. Yang, S.N. Chen, Y.W. Chen, C. Lee
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摘要

在生物医学大质量采样系统中,f-theta光学扫描系统利用旋转十二角形反射镜对医学样品测试板进行一定角度的扫描。该光学系统的光斑尺寸约为几微米,扫描范围约为3英寸,线性度约为0.5 mm。
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A design of reflective F-/spl theta/ lens
In the bio-medical mass-sampling system, an f-theta optical scanning system, using a rotating dodecagon mirror, can scan a range of angle on the medical samples test plate. The spot size of this optical system is about several micrometers and the scanning range is about 3 inch and the linearity is about 0.5 mm.
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