直流溅射功率对室温沉积的CIGS光伏用AZO薄膜性能的影响

2012 Asia Communications and Photonics Conference (ACP) Pub Date : 2012-11-07 DOI:10.1364/ACPC.2012.AF4B.38

Yuan-dong Li, Demiao Wang, Jingping Lu, Hao Jin, Jian Zhou

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摘要

在不同的溅射功率下，在玻璃衬底上沉积了Al:ZnO(AZO)薄膜。研究了溅射功率对AZO薄膜性能的影响。在330W时，AZO薄膜的电光性能达到最佳。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Effects of DC sputtering power on the properties of AZO films deposited at room temperature for CIGS photovoltaics

Al:ZnO(AZO) films were deposited on glass substrate at different sputtering power. Effects of sputtering power on the properties of AZO films were investigated. And the electro-optical property of the AZO films gets optimum at 330W.

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2012 Asia Communications and Photonics Conference (ACP)

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