{"title":"激光从硅表面去除微米粒子:一种二维方法","authors":"P. Neves, M. Arronte, R. Vilar","doi":"10.1109/CLEOE.2000.910071","DOIUrl":null,"url":null,"abstract":"Summary form only given. In this work, experimental measurements of cleaning efficiency for three different metallic particulate contaminants (Au, 1.2 /spl mu/m; Cu 3 /spl mu/m and W 0.7 /spl mu/m) on silicon are reported. To study the dependence of cleaning efficiency on the type of contaminant, absorption of laser radiation by particles and substrate is considered. The shadow effect of the metallic particles on the substrate imposes a bidimensional analysis of the temperature profile in the substrate.","PeriodicalId":250878,"journal":{"name":"Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Laser micron particle removal from silicon surfaces: a bidimensional approach\",\"authors\":\"P. Neves, M. Arronte, R. Vilar\",\"doi\":\"10.1109/CLEOE.2000.910071\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Summary form only given. In this work, experimental measurements of cleaning efficiency for three different metallic particulate contaminants (Au, 1.2 /spl mu/m; Cu 3 /spl mu/m and W 0.7 /spl mu/m) on silicon are reported. To study the dependence of cleaning efficiency on the type of contaminant, absorption of laser radiation by particles and substrate is considered. The shadow effect of the metallic particles on the substrate imposes a bidimensional analysis of the temperature profile in the substrate.\",\"PeriodicalId\":250878,\"journal\":{\"name\":\"Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505)\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-09-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CLEOE.2000.910071\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOE.2000.910071","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Laser micron particle removal from silicon surfaces: a bidimensional approach
Summary form only given. In this work, experimental measurements of cleaning efficiency for three different metallic particulate contaminants (Au, 1.2 /spl mu/m; Cu 3 /spl mu/m and W 0.7 /spl mu/m) on silicon are reported. To study the dependence of cleaning efficiency on the type of contaminant, absorption of laser radiation by particles and substrate is considered. The shadow effect of the metallic particles on the substrate imposes a bidimensional analysis of the temperature profile in the substrate.
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