利用优化的纳米磁体阵列实现层状光子纳米结构之间低于30nm的对准精度

A. Nichol, G. Barbastathis
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引用次数: 2

摘要

我们提出的实验结果表明,堆叠的纳米图案氮化硅膜的精细排列优于30纳米。经膜折叠的初始粗对准为2 μ m,从粗到细的对准提高了60倍以上。在折叠之前,利用薄膜上的纳米磁铁阵列之间的吸引力来实现对齐。光学光栅和圆孔形成三维光子晶体结构,薄膜释放前形成图案化,折叠后形成自对准。在多次折叠和展开操作中保持对齐性能。
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Sub-30nm alignment accuracy between layered photonic nanostructures using optimized nanomagnet arrays
We present experimental results indicating fine alignment of stacked nanopatterned silicon nitride membranes to better than 30 nm. The initial coarse alignment via membrane folding was 2 mum, which gives a coarse-to-fine alignment improvement of more than 60times. Alignment was achieved by using the attractive force between arrays of nanomagnets patterned on the membranes before folding. Optical gratings and circular voids forming a 3D photonic crystal-like structure were patterned before membrane release and self-aligned after folding. Alignment performance was maintained during multiple folding and unfolding operations.
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