通孔大孔硅的衍射效应

A.D. Remenyuk, E. Astrova, L.I. Korovin, I. G. Lang, V. Shuman
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摘要

大孔硅(ma-Si)是一种多孔硅,其表面垂直孔隙形成二维(2D)周期结构,孔隙深度比孔间距离和孔径大几个数量级。高质量的二维周期结构与高折射率对比的ma-Si相结合,为其作为二维光子晶体的应用开辟了道路。如果光沿垂直于孔轴的方向传播,就会出现光子带隙。间隙的光谱位置和宽度由结构对称性、孔间距离和孔半径确定。对于平行于孔轴传播的光,ma-Si可以用作短通滤光片,在短波长范围内是透明的,并阻挡长波辐射。在ma-Si滤光片中,光通过被硅包围的孔隙在空气中传播,吸收可见光。孔径,即孔径的直径和长度,决定了滤光片的透射光谱。据我们所知,目前仅有一项研究是针对可见光范围内的马硅传输进行的。本文对平行于孔轴传播的光在可见光范围内的ma-Si传输进行了进一步的实验和理论研究。
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Diffraction effects in macroporous silicon with through pores
The macroporous silicon (ma-Si) is a type of a porous Si where vertical pores form a two-dimensional (2D) periodic structure on the surface, and the pore depth is on orders of magnitude larger than the inter-pore distance and pore diameter. The combination of a high-quality 2D periodic structure with a high refractive index contrast in ma-Si opens the way to its application as a 2D photonic crystal. A photonic band gap appears if light propagates in a direction perpendicular to pore axis. The spectral position and width of the gap are defined by the structure symmetry, inter-pore distance, and pore radius. For the light propagating parallel to the pore axis, ma-Si can be used as a shortpass filter, transparent in the short-wavelength range and blocking the long-wavelength radiation. In ma-Si filters, light propagates in air in pores surrounded by silicon, absorbing visible light. The pore dimensions, i.e., their diameter and length, define the filter transmission spectrum. As far as we know by now, only one study devoted to ma-Si transmission in the visible range exists. The present study is devoted to further experimental and theoretical investigation of the ma-Si transmission in the visible range for the light propagating parallel to pore axis.
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