E. Oiller, L. Duraffourg, M. Delaye, H. Grange, S. Deneuville, J. Bernos, R. Dianoux, F. Marchi, D. Renaud, T. Baron, P. Andreucci, P. Robert
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NEMS Devices for Accelerometers Compatible with Thin SOI Technology
The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with "in-IC" integration. Modeling of Casimir force, design of accelerometers, improvement of hybrid e-beam/DUV lithography and FH-vapor release, development of specific AFM characterizations have allowed to fabricate NEMS devices and to provide AFM characterizations.
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