E. David, T. Zlotnikov, L. Gal, O. Lavie, Y. Nemirovsky
{"title":"用于微波应用的高调谐范围MEMS电容器","authors":"E. David, T. Zlotnikov, L. Gal, O. Lavie, Y. Nemirovsky","doi":"10.1109/COMCAS.2009.5386051","DOIUrl":null,"url":null,"abstract":"This paper presents a novel MEMS comb-structured variable capacitor at 20GHz that features a wide capacitance tuning range of 200%, yet avoids unwanted coupling through the springs. This new varactor consists of three comb structures — two of which are anchored to the substrate, while the third, which capacitively couples the two anchored ones, is movable, suspended on mechanical springs. This new design decouples the mechanical mechanism from the RF capacitor and allows an independent optimal design of the two.","PeriodicalId":372928,"journal":{"name":"2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems","volume":"55 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"High tuning range MEMS capacitor for microwave applications\",\"authors\":\"E. David, T. Zlotnikov, L. Gal, O. Lavie, Y. Nemirovsky\",\"doi\":\"10.1109/COMCAS.2009.5386051\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a novel MEMS comb-structured variable capacitor at 20GHz that features a wide capacitance tuning range of 200%, yet avoids unwanted coupling through the springs. This new varactor consists of three comb structures — two of which are anchored to the substrate, while the third, which capacitively couples the two anchored ones, is movable, suspended on mechanical springs. This new design decouples the mechanical mechanism from the RF capacitor and allows an independent optimal design of the two.\",\"PeriodicalId\":372928,\"journal\":{\"name\":\"2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems\",\"volume\":\"55 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/COMCAS.2009.5386051\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMCAS.2009.5386051","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
High tuning range MEMS capacitor for microwave applications
This paper presents a novel MEMS comb-structured variable capacitor at 20GHz that features a wide capacitance tuning range of 200%, yet avoids unwanted coupling through the springs. This new varactor consists of three comb structures — two of which are anchored to the substrate, while the third, which capacitively couples the two anchored ones, is movable, suspended on mechanical springs. This new design decouples the mechanical mechanism from the RF capacitor and allows an independent optimal design of the two.
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