高q微机械银无源和滤波器

2006 International Electron Devices Meeting Pub Date : 2006-12-01 DOI:10.1109/IEDM.2006.346889

M. Rais-Zadeh, P. Kohl, F. Ayazi

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引用次数: 21

摘要

本文介绍了高宽高比银(Ag)微加工，用于实现非常高质量因子(Q)可调谐，固定无源和低插入损耗带通LC滤波器。低损耗衬底和最高导电性金属的组合用于在无线电频率下实现创纪录的高Q和低插入损耗(IL)

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High-Q Micromachined Silver Passives and Filters

This paper presents high aspect-ratio silver (Ag) micromachining for implementation of very high quality factor (Q) tunable, and fixed passives, and low insertion loss bandpass LC filters. A combination of low-loss substrate and highest conductivity metal is used to achieve record high Q and low insertion loss (IL) at radio frequencies

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2006 International Electron Devices Meeting

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