利用轴向响应副瓣对飞秒激光共焦探头测量范围的理论研究

C. Chen, H. Matsukuma, R. Sato, Xiuguo Chen, Y. Shimizu, W. Gao
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引用次数: 1

摘要

本文通过对采集透镜进行适当的移动和调整,将主瓣移动到主瓣与副瓣间隙处,以解决测量范围不连续的问题。这样就可以利用轴向响应的旁瓣来扩大所建立的彩色共聚焦探头的测量范围。对彩色共聚焦探头测量范围的计算进行了理论分析和数值模拟。
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Theoretical investigation on measurement range of a femtosecond laser chromatic confocal probe by utilizing side-lobe of axial response
In this paper, by moving and adjusting the collecting lens suitably, the main-lobe is moved to the position where gap between main-lobe and side-lobe is located, aimed at solving the problem of discontinuous measurement range. So that the side-lobe of the axial response can be utilized for the purpose of extending the measurement range of the established chromatic confocal probe. Theoretical analysis and numerical simulation are carried out for computing the measurement range of the chromatic confocal probe.
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