Lianmin Yin, Yifan Dai, S. Xue, Zhifan Lin, Bing-Jiang Yang, Yongbin Wang
{"title":"压力槽对微射流加工的影响","authors":"Lianmin Yin, Yifan Dai, S. Xue, Zhifan Lin, Bing-Jiang Yang, Yongbin Wang","doi":"10.1117/12.2604493","DOIUrl":null,"url":null,"abstract":"Jet polishing plays an important role in ultra-precision machining. In this paper, the effects of slotted and slotless nozzles on micro jet machining are investigated. The pressure distribution and magnitude of the two nozzles on the workpiece were first calculated by finite element simulation software. Then a set of comparative tests were conducted on two single crystals of silicon. The results showed that the pressure distribution of the slotless nozzle was more uniform compared to the slotted nozzle, and the pressure value of the slotless nozzle on the surface of the workpiece was greater. In addition, the slotless nozzle is more capable of improving the surface roughness of the workpiece in the same time.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"12071 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The influence of pressure groove on micro jet machining\",\"authors\":\"Lianmin Yin, Yifan Dai, S. Xue, Zhifan Lin, Bing-Jiang Yang, Yongbin Wang\",\"doi\":\"10.1117/12.2604493\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Jet polishing plays an important role in ultra-precision machining. In this paper, the effects of slotted and slotless nozzles on micro jet machining are investigated. The pressure distribution and magnitude of the two nozzles on the workpiece were first calculated by finite element simulation software. Then a set of comparative tests were conducted on two single crystals of silicon. The results showed that the pressure distribution of the slotless nozzle was more uniform compared to the slotted nozzle, and the pressure value of the slotless nozzle on the surface of the workpiece was greater. In addition, the slotless nozzle is more capable of improving the surface roughness of the workpiece in the same time.\",\"PeriodicalId\":236529,\"journal\":{\"name\":\"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)\",\"volume\":\"12071 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-12-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2604493\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2604493","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The influence of pressure groove on micro jet machining
Jet polishing plays an important role in ultra-precision machining. In this paper, the effects of slotted and slotless nozzles on micro jet machining are investigated. The pressure distribution and magnitude of the two nozzles on the workpiece were first calculated by finite element simulation software. Then a set of comparative tests were conducted on two single crystals of silicon. The results showed that the pressure distribution of the slotless nozzle was more uniform compared to the slotted nozzle, and the pressure value of the slotless nozzle on the surface of the workpiece was greater. In addition, the slotless nozzle is more capable of improving the surface roughness of the workpiece in the same time.