压力槽对微射流加工的影响

Lianmin Yin, Yifan Dai, S. Xue, Zhifan Lin, Bing-Jiang Yang, Yongbin Wang
{"title":"压力槽对微射流加工的影响","authors":"Lianmin Yin, Yifan Dai, S. Xue, Zhifan Lin, Bing-Jiang Yang, Yongbin Wang","doi":"10.1117/12.2604493","DOIUrl":null,"url":null,"abstract":"Jet polishing plays an important role in ultra-precision machining. In this paper, the effects of slotted and slotless nozzles on micro jet machining are investigated. The pressure distribution and magnitude of the two nozzles on the workpiece were first calculated by finite element simulation software. Then a set of comparative tests were conducted on two single crystals of silicon. The results showed that the pressure distribution of the slotless nozzle was more uniform compared to the slotted nozzle, and the pressure value of the slotless nozzle on the surface of the workpiece was greater. In addition, the slotless nozzle is more capable of improving the surface roughness of the workpiece in the same time.","PeriodicalId":236529,"journal":{"name":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","volume":"12071 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The influence of pressure groove on micro jet machining\",\"authors\":\"Lianmin Yin, Yifan Dai, S. Xue, Zhifan Lin, Bing-Jiang Yang, Yongbin Wang\",\"doi\":\"10.1117/12.2604493\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Jet polishing plays an important role in ultra-precision machining. In this paper, the effects of slotted and slotless nozzles on micro jet machining are investigated. The pressure distribution and magnitude of the two nozzles on the workpiece were first calculated by finite element simulation software. Then a set of comparative tests were conducted on two single crystals of silicon. The results showed that the pressure distribution of the slotless nozzle was more uniform compared to the slotted nozzle, and the pressure value of the slotless nozzle on the surface of the workpiece was greater. In addition, the slotless nozzle is more capable of improving the surface roughness of the workpiece in the same time.\",\"PeriodicalId\":236529,\"journal\":{\"name\":\"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)\",\"volume\":\"12071 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-12-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2604493\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2604493","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

射流抛光在超精密加工中起着重要作用。研究了有槽喷嘴和无槽喷嘴对微射流加工的影响。首先利用有限元仿真软件计算了两个喷嘴在工件上的压力分布和大小。然后对两种硅单晶进行了一组对比试验。结果表明:与有槽喷嘴相比,无槽喷嘴的压力分布更均匀,工件表面的压力值更大;此外,无槽喷嘴更能同时提高工件的表面粗糙度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
The influence of pressure groove on micro jet machining
Jet polishing plays an important role in ultra-precision machining. In this paper, the effects of slotted and slotless nozzles on micro jet machining are investigated. The pressure distribution and magnitude of the two nozzles on the workpiece were first calculated by finite element simulation software. Then a set of comparative tests were conducted on two single crystals of silicon. The results showed that the pressure distribution of the slotless nozzle was more uniform compared to the slotted nozzle, and the pressure value of the slotless nozzle on the surface of the workpiece was greater. In addition, the slotless nozzle is more capable of improving the surface roughness of the workpiece in the same time.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Spectral-domain asymptotics for electromagnetic scattering from a point-source excitation target coated with a uniaxial electric anisotropic medium based on physical optics Speckle noise suppression of digital holographic microscopy with diffusion glass rotation Infrared multispectral imaging system based on metasurfaces for two infrared atmospheric windows Thermal behavior of superwetting alumina coated on copper mesh during laser cladding for enhanced oil/water separation Large-range piston error detection technology based on dispersed fringe sensor
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1