一种提取金属薄膜导热系数的新技术

2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC) Pub Date : 2011-10-13 DOI:10.1109/ESSDERC.2011.6044164

Zhaowang Zong, Z. Qiu, Ran Liu

{"title":"一种提取金属薄膜导热系数的新技术","authors":"Zhaowang Zong, Z. Qiu, Ran Liu","doi":"10.1109/ESSDERC.2011.6044164","DOIUrl":null,"url":null,"abstract":"The frequency-dependent thermal response in 3ω measurement is investigated using transient electro-thermal coupling simulations. Furthermore, the heat flow ratio m(ω), quantifying the deviation degree of Cahill's model, is exploited for extraction of the thermal conductivity of the heater strip itself, which extends the capability of 3ω method to high-thermal-conductivity thin films.","PeriodicalId":161896,"journal":{"name":"2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-10-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A novel technique for extraction of thermal conductivity in metallic thin films\",\"authors\":\"Zhaowang Zong, Z. Qiu, Ran Liu\",\"doi\":\"10.1109/ESSDERC.2011.6044164\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The frequency-dependent thermal response in 3ω measurement is investigated using transient electro-thermal coupling simulations. Furthermore, the heat flow ratio m(ω), quantifying the deviation degree of Cahill's model, is exploited for extraction of the thermal conductivity of the heater strip itself, which extends the capability of 3ω method to high-thermal-conductivity thin films.\",\"PeriodicalId\":161896,\"journal\":{\"name\":\"2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC)\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-10-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ESSDERC.2011.6044164\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESSDERC.2011.6044164","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

利用瞬态电-热耦合模拟研究了3ω测量中频率相关的热响应。此外，利用量化Cahill模型偏差程度的热流比m(ω)提取加热条本身的导热系数，将3ω方法的能力扩展到高导热薄膜。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

A novel technique for extraction of thermal conductivity in metallic thin films

The frequency-dependent thermal response in 3ω measurement is investigated using transient electro-thermal coupling simulations. Furthermore, the heat flow ratio m(ω), quantifying the deviation degree of Cahill's model, is exploited for extraction of the thermal conductivity of the heater strip itself, which extends the capability of 3ω method to high-thermal-conductivity thin films.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC)

自引率

0.00%

发文量