FPD曝光工具的高分辨率技术和实现1.0 μm L&S分辨率的新型宽带照明技术

{"title":"FPD曝光工具的高分辨率技术和实现1.0 μm L&S分辨率的新型宽带照明技术","authors":"Toru Okubo, Manabu Hakko, Nobuhiko Yabu, K. Toyoda, Miwako Ando, Takeo Oyanagi, Yusuke Miyoshi, Ryousuke Fukuoka, Nozomu Izumi, F. Ono, Takaaki Terashi, Yoshinori Osaki","doi":"10.36463/idw.2022.0319","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":379548,"journal":{"name":"Proceedings of the International Display Workshops","volume":"49 3","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High Resolution Technology of FPD Exposure Tools and a New Broadband Illumination Technique to Achieve 1.0 μm L&S Resolution\",\"authors\":\"Toru Okubo, Manabu Hakko, Nobuhiko Yabu, K. Toyoda, Miwako Ando, Takeo Oyanagi, Yusuke Miyoshi, Ryousuke Fukuoka, Nozomu Izumi, F. Ono, Takaaki Terashi, Yoshinori Osaki\",\"doi\":\"10.36463/idw.2022.0319\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":379548,\"journal\":{\"name\":\"Proceedings of the International Display Workshops\",\"volume\":\"49 3\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-12-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the International Display Workshops\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.36463/idw.2022.0319\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the International Display Workshops","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.36463/idw.2022.0319","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}