空间低能质子辐照对金刚石薄膜光学性能的影响

Kesheng Guo, Q. Hu, Qiaoyi Liu, B. He, Tianyun Li, Lang Hu
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摘要

金刚石薄膜在宽波长范围内是透明的(紫外-远红外-太赫兹波段传输),用于光学窗,飞机导弹罩等,其中空间中的低能质子(keV量级)会产生间隙,空位和其他物质辐射效应。本文采用微波等离子体化学气相沉积的方法在熔融二氧化硅表面生长出不同晶粒尺寸的金刚石薄膜,研究了质子辐照对金刚石薄膜表面形貌、透光率和拉曼光谱的影响。用蒙特卡罗方法计算分析了质子辐照下金刚石薄膜的离子分布和空位分布。当甲烷/氢气的流量比为1%时,通过调整样品台阶的高度,在熔融二氧化硅表面制备了不同生长温度的金刚石纳米晶膜。质子辐照后,薄膜的透光率曲线有轻微的红移,在500 ~ 900nm波长范围内透光率明显下降,最大透光率下降5 ~ 7%。质子辐照后,拉曼光谱的峰值强度变弱,金刚石相和非金刚石相的峰值强度都减弱。在能量为50keV的质子照射下,金刚石膜的主要作用深度在2-5微米范围内,对表面和更深区域的影响不明显,但在几微米的深度处产生间隙和空位。
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Effects of space low energy proton irradiation on optical properties of diamond thin films
Diamond films are transparent in a wide range of wavelengths (ultraviolet-far-infrared-terahertz bands are transmitted), and are used in optical windows, aircraft missile hoods, etc., where low-energy protons (keV magnitude) in space will create gaps, vacancies and other material radiation effects. In this paper, diamond films with different grain sizes were grown on the surface of fused silica by microwave plasma chemical vapor deposition, and the influence of proton irradiation on the surface morphology, optical transmittance and Raman spectrum of diamond films was studied. The ion distribution and vacancy distribution of diamond thin films under proton irradiation were calculated and analyzed by calculation (Monte Carlo method). When the flow ratio of methane/hydrogen was 1%, by adjusting the height of the sample stage, diamond nanocrystalline films with different growth temperatures were prepared on the surface of fused silica. After proton irradiation, the transmittance curve of the film has a slight red shift, and the transmittance decreases significantly in the wavelength range of 500-900nm, and the maximum transmittance decreases by 5-7%. After proton irradiation, the peak intensities of the Raman spectra become weaker, and the peak intensities of both the diamond phase and the non-diamond phase are weakened. Under the irradiation of protons with energy of 50keV, the main action depth of the diamond film is in the range of 2-5 microns, and the effect on the surface and deeper regions is not obvious, but gaps and vacancies are generated at a depth of several micrometers.
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