{"title":"连续浮雕微光学的制作:激光书写和复制技术的进展","authors":"M. T. Gale, T. Hessler, R. Kunz, H. Teichmann","doi":"10.1364/domo.1996.dtha.2","DOIUrl":null,"url":null,"abstract":"Laser writing technology for the fabrication of continuous-relief micro-optical elements is being developed at a number of institutes worldwide [1,2]. It represents a very powerful and flexible fabrication technique and fits well to replication technology in which the resist surface-relief microstructure can be electroformed and replicated into plastic material. Fig. 1 illustrates the essential production steps involved.","PeriodicalId":301804,"journal":{"name":"Diffractive Optics and Micro-Optics","volume":"316 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Fabrication of continuous-relief micro-optics: progress in laser writing and replication technology\",\"authors\":\"M. T. Gale, T. Hessler, R. Kunz, H. Teichmann\",\"doi\":\"10.1364/domo.1996.dtha.2\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Laser writing technology for the fabrication of continuous-relief micro-optical elements is being developed at a number of institutes worldwide [1,2]. It represents a very powerful and flexible fabrication technique and fits well to replication technology in which the resist surface-relief microstructure can be electroformed and replicated into plastic material. Fig. 1 illustrates the essential production steps involved.\",\"PeriodicalId\":301804,\"journal\":{\"name\":\"Diffractive Optics and Micro-Optics\",\"volume\":\"316 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Diffractive Optics and Micro-Optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/domo.1996.dtha.2\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Diffractive Optics and Micro-Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/domo.1996.dtha.2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication of continuous-relief micro-optics: progress in laser writing and replication technology
Laser writing technology for the fabrication of continuous-relief micro-optical elements is being developed at a number of institutes worldwide [1,2]. It represents a very powerful and flexible fabrication technique and fits well to replication technology in which the resist surface-relief microstructure can be electroformed and replicated into plastic material. Fig. 1 illustrates the essential production steps involved.
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