微波可调谐带通滤波器与MEMS热致动器

2008 European Microwave Integrated Circuit Conference Pub Date : 2008-10-01 DOI:10.1109/EMICC.2008.4772334

S. Fouladi, W. Dong Yan, R. Mansour

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引用次数: 7

摘要

提出了一种利用MEMS热致动器对微波带通滤波器的中心频率进行线性调谐的方法。设计、制作并测试了一种工作在ka波段的三极微波可调谐带通滤波器。所制备的滤波器中心频率为33 GHz，相对带宽为14%。中频插入损耗为2.7 dB，回波损耗优于10 dB。在28ghz至33ghz范围内实现了15%的连续线性调谐，在调谐范围内，中频插入损耗优于3.3 dB。

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Microwave Tunable Bandpass Filter with MEMS Thermal Actuators

This paper presents an approach to linearly tune the center frequency of a microwave bandpass filter using MEMS thermal actuators. A three-pole microwave tunable bandpass filter operating at Ka-band is designed, fabricated and tested. The fabricated filter has a center frequency at 33 GHz and a 14% relative bandwidth. The mid-band insertion loss is 2.7 dB and the return loss is better than 10 dB. A 15% continuous linear tuning range from 28 GHz to 33 GHz is achieved with a mid-band insertion loss better than 3.3 dB over the tuning range.

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2008 European Microwave Integrated Circuit Conference

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