蓝宝石衬底氮化镓光栅耦合器全息光刻技术

Proceedings of 2005 International Students and Young Scientists Workshop Photonics and Microsystems, 2005. Pub Date : 2005-07-07 DOI:10.1109/STYSW.2005.1617790

R. Dylewicz, S. Patela, R. Paszkiewicz, M. Tlaczala, S. Bartkiewicz, A. Miniewicz

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引用次数: 2

摘要

本文报道了在蓝宝石衬底上生长氮化镓的光栅耦合器的全息光刻技术。当考虑进一步的蚀刻工艺时，散斑效应的影响尤为显著

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Holographic lithography for grating coupler fabrication in gallium nitride grown on sapphire substrate

The paper reports on holographic lithography for fabrication of grating coupler in gallium nitride grown on sapphire substrate. The impact of the speckle effect is especially significant when further etching process is taken into consideration

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Proceedings of 2005 International Students and Young Scientists Workshop Photonics and Microsystems, 2005.

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