应用于红外测温仪的5.5 μm红外滤光片研究

Suotao Dong, Xiuhua Fu
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引用次数: 0

摘要

随着新型冠状病毒肺炎在世界范围内的影响扩大,人们对红外测温枪的依赖程度越来越高。为了提高红外测温枪的测量精度,满足快速、准确测量人体体温的要求,本文对红外测温枪的核心部件进行了研制。通过测量薄膜的原子力显微镜图像和红外光谱,分析并解决了金属锗的各向异性和半导体性质引起的薄膜起雾现象,采用电子束蒸发、电阻蒸发和离子源辅助沉积的方法制备了高透光率、薄膜质量好的5.5微米红外滤光片。
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Research on 5.5 μm Infrared Filter Applied to Infrared Thermometer
With the expansion of novel coronavirus pneumonia's influence on the world, people's dependence on infrared thermometer guns is increasing. In order to improve the measurement accuracy of the infrared temperature measuring gun and meet the requirements of rapid and accurate measurement of human body temperature, the core components for the infrared temperature measuring gun are developed and prepared in this paper. The film fogging phenomenon caused by the anisotropy of metal germanium and semiconductor properties is analysed and solved by measuring the atomic force microscope image and infrared spectrum of the film, the 5.5-micron infrared filter with high transmittance and good film quality was prepared by electron beam evaporation, resistance evaporation and ion source assisted deposition.
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