先进半导体技术中心:未来的技术引擎

IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop Pub Date : 1990-09-11 DOI:10.1109/ASMC.1990.111232

J. Kristoff

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摘要

只提供摘要形式。讨论了IBM的先进半导体技术中心(ASTC)，它为未来几代半导体技术提供了一个开发制造商的模型。ASTC保证了制造环境的发展。设施、设备和材料的设计都是为了满足未来技术的可制造性。给出了一些技术发展趋势

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The Advanced Semiconductor Technology Center: a technology engine for the future

Summary form only given. IBM's Advanced Semiconductor Technology Center (ASTC), which provides a model of a development fabricator for future generations of semiconductor technology, is discussed. The ASTC assures development with a manufacturing environment. Facilities, equipment, and materials have been designed to meet future technology manufacturability. Some technology trends are given.<>

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IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop

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