添加氮对大气压Ar/HMDS等离子体影响的光谱分析

{"title":"添加氮对大气压Ar/HMDS等离子体影响的光谱分析","authors":"Jonggu Han, Rodolphe Mauchauffé, Se Youn Moon","doi":"10.5757/asct.2023.32.5.114","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":8223,"journal":{"name":"Applied Science and Convergence Technology","volume":null,"pages":null},"PeriodicalIF":1.2000,"publicationDate":"2023-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Spectroscopic Analysis of Effects of Additive Nitrogen on Atmospheric Pressure Ar/HMDS Plasma\",\"authors\":\"Jonggu Han, Rodolphe Mauchauffé, Se Youn Moon\",\"doi\":\"10.5757/asct.2023.32.5.114\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":8223,\"journal\":{\"name\":\"Applied Science and Convergence Technology\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.2000,\"publicationDate\":\"2023-09-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applied Science and Convergence Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.5757/asct.2023.32.5.114\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Science and Convergence Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.5757/asct.2023.32.5.114","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}