在表面粗糙度较大的外来基底上通过金属有机化学气相沉积法生长量子级联激光器

IF 2.1 4区 物理与天体物理 Q2 OPTICS Photonics Pub Date : 2023-12-14 DOI:10.3390/photonics10121377
Shining Xu, Shuqi Zhang, J. Kirch, Cheng Liu, A. Wibowo, S. R. Tatavarti, D. Botez, L. Mawst
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引用次数: 0

摘要

缓冲模板的表面形态是晶格失配严重的光电器件进行异外延集成的一个重要因素。在这项工作中,在砷化镓和硅衬底上生长了基于 InP 的长波红外(约 8 µm)发射量子级联激光器,其有源区设计与 InP 的晶格匹配,并采用了 InAlGaAs 梯级变质缓冲层,以此来评估表面粗糙度对器件性能的影响。在硅模板上,即使 100 µm2 的粗糙度均方根值高达 17.1 nm,也能实现室温脉冲操作激光,器件性能相对较好。这些结果表明,即使存在较高的残余位错密度,带间操作器件也能很好地容忍较大的表面粗糙度有效值。
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Quantum Cascade Lasers Grown by Metalorganic Chemical Vapor Deposition on Foreign Substrates with Large Surface Roughness
The surface morphology of a buffer template is an important factor in the heteroepitaxial integration of optoelectronic devices with a significant lattice mismatch. In this work, InP-based long-wave infrared (~8 µm) emitting quantum cascade lasers with active region designs lattice-matched to InP were grown on GaAs and Si substrates employing InAlGaAs step-graded metamorphic buffer layers, as a means to assess the impact of surface roughness on device performance. A room-temperature pulsed-operation lasing with a relatively good device performance was obtained on a Si template, even with a large RMS roughness of 17.1 nm over 100 µm2. Such results demonstrate that intersubband-operating devices are highly tolerant to large RMS surface roughness, even in the presence of a high residual dislocation density.
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来源期刊
Photonics
Photonics Physics and Astronomy-Instrumentation
CiteScore
2.60
自引率
20.80%
发文量
817
审稿时长
8 weeks
期刊介绍: Photonics (ISSN 2304-6732) aims at a fast turn around time for peer-reviewing manuscripts and producing accepted articles. The online-only and open access nature of the journal will allow for a speedy and wide circulation of your research as well as review articles. We aim at establishing Photonics as a leading venue for publishing high impact fundamental research but also applications of optics and photonics. The journal particularly welcomes both theoretical (simulation) and experimental research. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced. Electronic files and software regarding the full details of the calculation and experimental procedure, if unable to be published in a normal way, can be deposited as supplementary material.
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